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Effects of ion irradiation on thermally formed silicides in the presence of interfacial oxide
C.-D. Lien, M.-A. Nicolet, Peter WilliamsVolume:
136
Year:
1986
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(86)90109-4
File:
PDF, 471 KB
english, 1986