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On the evaluation of depth resolution from depth profiles of multilayers: Comment on “multiple point depth profiling of multilayer Cr-Ni thin film structures deposited on a rough substrate using scanning Auger microscopy”
D. Marton, J. LászlóVolume:
136
Year:
1986
Language:
english
Pages:
1
DOI:
10.1016/0040-6090(86)90119-7
File:
PDF, 135 KB
english, 1986