Plasma-deposited fluorocarbon films on silicon studied by ellipsometry
Gottlieb S. Oehrlein, Ivar Reimanis, Young H. LeeVolume:
143
Year:
1986
Language:
english
Pages:
10
DOI:
10.1016/0040-6090(86)90180-x
File:
PDF, 548 KB
english, 1986