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Dependence of the hardness of titanium nitride prepared by plasma chemical vapour deposition on the gas flow rate and the r.f. power
Ryogi Makabe, Sadao Nakajima, Osamu Tabata, Masaki AokiVolume:
137
Year:
1986
Language:
english
Pages:
1
DOI:
10.1016/0040-6090(86)90205-1
File:
PDF, 117 KB
english, 1986