Dependence of the hardness of titanium nitride prepared by...

Dependence of the hardness of titanium nitride prepared by plasma chemical vapour deposition on the gas flow rate and the r.f. power

Ryogi Makabe, Sadao Nakajima, Osamu Tabata, Masaki Aoki
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Volume:
137
Year:
1986
Language:
english
Pages:
1
DOI:
10.1016/0040-6090(86)90205-1
File:
PDF, 117 KB
english, 1986
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