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IR and x-ray studies of ion-beam-synthesized aluminium nitride films
Amarjit Singh, R.A. Lessard, E.J. KnystautasVolume:
138
Year:
1986
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(86)90217-8
File:
PDF, 477 KB
english, 1986