Thermodynamic investigations of the gas phase reaction of...

Thin Solid Films 1986 Vol. 140; Iss. 2

Thermodynamic investigations of the gas phase reaction of SiH4 and O2 at atmospheric pressure

C. Pavelescu, C. Cobianu, F. Segal
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Volume:
140
Year:
1986
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(86)90269-5
File:
PDF, 350 KB
english, 1986
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