TiNx coatings prepared by d.c. reactive magnetron...

TiNx coatings prepared by d.c. reactive magnetron sputtering

J. Musil, L. Bárdoš, A. Rajský, J. Vyskočil, B. Doležal, G. Lončar, K. Daďourek, V. Kubíček
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Volume:
136
Year:
1986
Language:
english
Pages:
11
DOI:
10.1016/0040-6090(86)90282-8
File:
PDF, 1.23 MB
english, 1986
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