Sputtering of SiO2 in O2Ar atmospheres

Thin Solid Films 1986 Vol. 139; Iss. 2

Sputtering of SiO2 in O2Ar atmospheres

J. Santamaría, E. Iborra, F. Sánchez Quesada, G. González Díaz, M. Rodríguez Vidal
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Volume:
139
Year:
1986
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(86)90338-x
File:
PDF, 370 KB
english, 1986
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