Separation of thin aluminium films from silicon substrates

Thin Solid Films 1986 Vol. 139; Iss. 2

Separation of thin aluminium films from silicon substrates

R.B. Badachhape, J.L. Margrave, F.R. Brotzen
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Volume:
139
Year:
1986
Language:
english
Pages:
1
DOI:
10.1016/0040-6090(86)90341-x
File:
PDF, 86 KB
english, 1986
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