Processing of titanium films on silicon using a Q-switched...

Thin Solid Films 1986 Vol. 144; Iss. 2

Processing of titanium films on silicon using a Q-switched ruby laser

E. Maydell-Ondrusz, P.L.F. Hemment, K.G. Stephens
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Volume:
144
Year:
1986
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(86)90421-9
File:
PDF, 432 KB
english, 1986
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