Observations on the operation of a planar magnetron sputtering system by target erosion patterns
Tatsuo Fukami, Fumihiko Shintani, Masahiko NaoeVolume:
151
Year:
1987
Language:
english
Pages:
9
DOI:
10.1016/0040-6090(87)90136-2
File:
PDF, 567 KB
english, 1987