Structure, internal stresses, adhesion and wear resistance...

Thin Solid Films 1987 Vol. 153; Iss. 1-3

Structure, internal stresses, adhesion and wear resistance of sputtered alumina coatings

Th. Roth, K.H. Kloos, E. Broszeit
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Volume:
153
Year:
1987
Language:
english
Pages:
11
DOI:
10.1016/0040-6090(87)90176-3
File:
PDF, 1.45 MB
english, 1987
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