Auger electron spectroscopy and Rutherford backscattering...

Thin Solid Films 1987 Vol. 153; Iss. 1-3

Auger electron spectroscopy and Rutherford backscattering spectroscopy studies of TiN and TiC coatings prepared by the activated reactive evaporation process

N. Kaufherr, G.R. Fenske, D.E. Busch, P. Lin, C. Deshpandey, R.F. Bunshah
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Volume:
153
Year:
1987
Language:
english
Pages:
9
DOI:
10.1016/0040-6090(87)90178-7
File:
PDF, 533 KB
english, 1987
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