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Stoichiometry in Ti-N barrier layers studied by X-ray emission spectroscopy
M. Dapor, M. Elena, S. Girardi, G. Giunta, L. Guzman, A.M. NarsaleVolume:
153
Year:
1987
Language:
english
Pages:
9
DOI:
10.1016/0040-6090(87)90191-x
File:
PDF, 662 KB
english, 1987