Some properties of r.f. planar magnetron-sputtered corning 7059 glass films
H. Jerominek, S. Patela, J.Y.D. Pomerleau, C. Delisle, R. TremblayVolume:
146
Year:
1987
Language:
english
Pages:
10
DOI:
10.1016/0040-6090(87)90221-5
File:
PDF, 510 KB
english, 1987