Plasma-enhanced chemical vapor deposition of molybdenum

Plasma-enhanced chemical vapor deposition of molybdenum

N.J. Ianno, J.A. Plaster
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Volume:
147
Year:
1987
Language:
english
Pages:
10
DOI:
10.1016/0040-6090(87)90284-7
File:
PDF, 470 KB
english, 1987
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