![](/img/cover-not-exists.png)
Sputtering of Mo-Si layers from composite targets
G. Lippert, M. Procop, W. Borchardt, L. Spieβ, P. UrwankVolume:
149
Year:
1987
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(87)90297-5
File:
PDF, 418 KB
english, 1987