Characterization of thin Al2O3 films on InP substrates by X-ray topography
P. Franzosi, M. Scaffardi, M. Meliga, F. Taiariol, S. TamagnoVolume:
148
Year:
1987
Language:
english
Pages:
1
DOI:
10.1016/0040-6090(87)90329-4
File:
PDF, 274 KB
english, 1987