Plasma-polymerized electron beam resists prepared from methyl methacrylate using various carrier gases
S.A Gangal, M Hori, S Morita, S HattoriVolume:
149
Year:
1987
Language:
english
Pages:
10
DOI:
10.1016/0040-6090(87)90397-x
File:
PDF, 422 KB
english, 1987