Auger electron spectroscopy and capacitance-voltage investigation of the AlN-Si interface
A.G. Abdullayev, S.K. Khanjanov, G.N. Kasimova, T.G. FufayevaVolume:
146
Year:
1987
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(87)90433-0
File:
PDF, 349 KB
english, 1987