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Resistivity anisotropy of nickel films induced by oblique incidence sputter deposition
Kaizo Kuwahara, Sukehiro ShinzatoVolume:
164
Year:
1988
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(88)90128-9
File:
PDF, 169 KB
english, 1988