![](/img/cover-not-exists.png)
Internal stress and adhesion of r.f.-sputtered MgO films on glass substrates
S. Baba, A. Kinbara, T. Kajiwara, K. WatanabeVolume:
164
Year:
1988
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(88)90129-0
File:
PDF, 502 KB
english, 1988