Hydrogenated amorphous Si-C alloy prepared by chemical...

Hydrogenated amorphous Si-C alloy prepared by chemical vapour deposition

A. Yoshida, Y. Yamada, T. Nakamura, H. Yonezu
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Volume:
164
Year:
1988
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(88)90137-x
File:
PDF, 177 KB
english, 1988
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