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Failure mechanisms of TiN thin film diffusion barriers
N. Kumar, K. Pourrezaei, B. Lee, E.C. DouglasVolume:
164
Year:
1988
Language:
english
Pages:
12
DOI:
10.1016/0040-6090(88)90171-x
File:
PDF, 2.61 MB
english, 1988