Electrical properties of plasma-deposited fluorinated...

Thin Solid Films 1988 Vol. 162; Iss. none

Electrical properties of plasma-deposited fluorinated silicon nitride

R.E. Livengood, D.W. Hess
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Volume:
162
Year:
1988
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(88)90193-9
File:
PDF, 384 KB
english, 1988
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