![](/img/cover-not-exists.png)
Optical analysis of inhomogeneous weakly absorbing thin films by spectroscopic reflectometry: Application to carbon films
I. Ohlídal, K. NavrátilVolume:
162
Year:
1988
Language:
english
Pages:
9
DOI:
10.1016/0040-6090(88)90198-8
File:
PDF, 428 KB
english, 1988