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Efficiencies of InAs transport and epitaxial growth by chemical vapour deposition in the system InAs-AsCl3-H2
E.P. Trifonova, L. HitovaVolume:
161
Year:
1988
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(88)90257-x
File:
PDF, 201 KB
english, 1988