Modelling of 18O tracer studies of the oxygen redistribution during formation of SiO2 layers by high dose implantation
H.U. Jager, J.A. Kilner, R.J. Chater, P.L.F. Hemment, R.F. Peart, K.J. ReesonVolume:
161
Year:
1988
Language:
english
Pages:
10
DOI:
10.1016/0040-6090(88)90265-9
File:
PDF, 504 KB
english, 1988