A study of the properties of low temperature chemically...

Thin Solid Films 1988 Vol. 161; Iss. none

A study of the properties of low temperature chemically vapour deposited phosphosilicate glass films

C. Pavelescu, C. Cobianu, N. Vlahovici, C. Ghita
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
161
Year:
1988
Language:
english
Pages:
1
DOI:
10.1016/0040-6090(88)90270-2
File:
PDF, 109 KB
english, 1988
Conversion to is in progress
Conversion to is failed