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Structure of TiN coatings deposited at relatively high rates and low temperatures by magnetron sputtering
V. Valvoda, R. Kužel Jr., R. Černý, J. MusilVolume:
156
Year:
1988
Language:
english
Pages:
12
DOI:
10.1016/0040-6090(88)90282-9
File:
PDF, 539 KB
english, 1988