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New results in d.c. reactive magnetron deposition of TiNx films
J. Musil, S. Kadlec, J. Vyskočil, V. ValvodaVolume:
167
Year:
1988
Language:
english
Pages:
14
DOI:
10.1016/0040-6090(88)90487-7
File:
PDF, 740 KB
english, 1988