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Use of binuclear organometallic compounds in chemical vapour deposition
R. Feurer, M. Larhrafi, R. Morancho, R. CalsouVolume:
167
Year:
1988
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(88)90496-8
File:
PDF, 436 KB
english, 1988