Sputter deposition of thin tantalum layers and low...

Sputter deposition of thin tantalum layers and low temperature interactions between tantalum and SiO2 and tantalum and silicon

P. Gallais, J.J. Hantzpergue, J.C. Remy, D. Roptin
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Volume:
165
Year:
1988
Language:
english
Pages:
10
DOI:
10.1016/0040-6090(88)90693-1
File:
PDF, 499 KB
english, 1988
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