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Sputter deposition of thin tantalum layers and low temperature interactions between tantalum and SiO2 and tantalum and silicon
P. Gallais, J.J. Hantzpergue, J.C. Remy, D. RoptinVolume:
165
Year:
1988
Language:
english
Pages:
10
DOI:
10.1016/0040-6090(88)90693-1
File:
PDF, 499 KB
english, 1988