The effects of oxygen concentration in sputter-deposited molybdenum films
T.T. Bardin, J.G. Pronkoz, R.C. Budhani, J.S. Lin, R.F. BunshahVolume:
165
Year:
1988
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(88)90695-5
File:
PDF, 228 KB
english, 1988