Dry formation of a fatty acid crystallized thin film and...

Thin Solid Films 1989 Vol. 180; Iss. 1-2

Dry formation of a fatty acid crystallized thin film and application as an electron beam resist

Hisato Kato, Masahiro Tawata, Shinzo Morita, Shuzo Hattori
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Volume:
180
Year:
1989
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(89)90087-4
File:
PDF, 596 KB
english, 1989
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