Thermal stability of TaSix/n-GaAs metallizations

Thermal stability of TaSix/n-GaAs metallizations

A. Paccagnella, C.C. Han, S.S. Lau, A. Gasparotto, A. Carnera, C. Canali
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Volume:
176
Year:
1989
Language:
english
Pages:
10
DOI:
10.1016/0040-6090(89)90092-8
File:
PDF, 673 KB
english, 1989
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