Adhesion studies of magnetron-sputtered copper films on...

Adhesion studies of magnetron-sputtered copper films on chemically etched nickel substrates: Effects of the concentration and the temperature of the bath

M. Cailler, A. Lahmar, G.H. Lee
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Volume:
182
Year:
1989
Language:
english
Pages:
18
DOI:
10.1016/0040-6090(89)90253-8
File:
PDF, 1.47 MB
english, 1989
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