Surface step structure of a lens-shaped Si(001) vicinal...

Thin Solid Films 1989 Vol. 183; Iss. 1-2

Surface step structure of a lens-shaped Si(001) vicinal substrate

Kunihiro Sakamoto, Kazushi Miki, Tsunenori Sakamoto
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Volume:
183
Year:
1989
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(89)90448-3
File:
PDF, 247 KB
english, 1989
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