Evaluation of mechanical properties of TiN films by...

Thin Solid Films 1989 Vol. 181; Iss. 1-2

Evaluation of mechanical properties of TiN films by ultralow load indentation

Michael E O'Hern, Robert H Parrish, Warren C Oliver
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Volume:
181
Year:
1989
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(89)90504-x
File:
PDF, 422 KB
english, 1989
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