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Synthesis of silicon nitride films using the are technique
J.S Yoon, H.J Doerr, C.V Deshpandey, R.F BunshahVolume:
181
Year:
1989
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(89)90529-4
File:
PDF, 355 KB
english, 1989