Comparison of the diffusion barrier properties of tungsten...

Comparison of the diffusion barrier properties of tungsten films prepared by hydrogen and silicon reduction of tungsten hexafluoride

O. Thomas, A. Charai, F.M. D'Heurle, T.G. Finstad, R.V. Joshi
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Volume:
171
Year:
1989
Language:
english
Pages:
15
DOI:
10.1016/0040-6090(89)90641-x
File:
PDF, 946 KB
english, 1989
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