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Growth of GaAs and AlAs thin films by a new atomic layer epitaxy technique
M. Ozeki, K. Mochizuki, N. Ohtsuka, K. KodamaVolume:
174
Year:
1989
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(89)90870-5
File:
PDF, 410 KB
english, 1989