Diode r.f. sputtering of copper and copper oxide thin films...

Thin Solid Films 1989 Vol. 174; Iss. part-P1

Diode r.f. sputtering of copper and copper oxide thin films and multilayers

Pierre Boher, Philippe Houdy, Claude Schiller, L.J. Van Ijzendoorn
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Volume:
174
Year:
1989
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(89)90875-4
File:
PDF, 394 KB
english, 1989
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