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Sputtering of TiN coatings during ion beam mixing
W. Bolse, Th. Corts, Th. Weber, M. Uhrmacher, K.P. LiebVolume:
174
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(89)90881-x
File:
PDF, 189 KB
english, 1989