Characterization of ion-beam- and magnetron- sputtered...

Thin Solid Films 1989 Vol. 174; Iss. part-P1

Characterization of ion-beam- and magnetron- sputtered YBa2Cu3O7−x high Tc superconducting films by secondary neutral mass spectrometry depth profiling

C. Mössner, K.-D. Ufert, P. Köpfer, V. Rupertus, H. Oechsner
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Volume:
174
Year:
1989
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(89)90899-7
File:
PDF, 410 KB
english, 1989
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