![](/img/cover-not-exists.png)
Strain effect in single-crystal silicon-based multilayer surface acoustic wave structures
V.M. Koleshko, Yu.V. Meshkov, V.V. BarkalinVolume:
190
Year:
1989
Language:
english
Pages:
14
DOI:
10.1016/0040-6090(89)90926-7
File:
PDF, 617 KB
english, 1989