Sputtering characteristics of diamond and hydrogenated...

Thin Solid Films 1990 Vol. 185; Iss. 1

Sputtering characteristics of diamond and hydrogenated amorphous carbon films by r.f. plasma

Kenji Kobayashi, Kiyoyuki Yamamoto, Nobuki Mutsukura, Yoshio Machi
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Volume:
185
Year:
1990
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(90)90007-z
File:
PDF, 924 KB
english, 1990
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