Preparation of cubic boron nitride film by CO2 laser...

Thin Solid Films 1990 Vol. 189; Iss. 1

Preparation of cubic boron nitride film by CO2 laser physical vapour deposition with simultaneous nitrogen ion supply

S. Mineta, M. Kohata, N. Yasunaga, Y. Kikuta
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Volume:
189
Year:
1990
Language:
english
Pages:
14
DOI:
10.1016/0040-6090(90)90033-a
File:
PDF, 818 KB
english, 1990
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