Deposition and properties of germanium-carbon alloy films...

Thin Solid Films 1990 Vol. 187; Iss. 1

Deposition and properties of germanium-carbon alloy films produced from tetraethylgermanium in an r.f. discharge

M. Gazicki, K. Pirker, R. Schallauer, W. Fallmann, F. Olcaytug, G. Urban, A. Jachimowicz, F. Kohl
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Volume:
187
Year:
1990
Language:
english
Pages:
13
DOI:
10.1016/0040-6090(90)90109-q
File:
PDF, 616 KB
english, 1990
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