Reactively sputtered indium tin oxide polycrystalline thin...

Reactively sputtered indium tin oxide polycrystalline thin films as NO and NO2 gas sensors

G. Sberveglieri, P. Benussi, G. Coccoli, S. Groppelli, P. Nelli
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Volume:
186
Year:
1990
Language:
english
Pages:
12
DOI:
10.1016/0040-6090(90)90150-c
File:
PDF, 482 KB
english, 1990
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